电子设备产品说明书部分翻译
1．被镀工件必须清洗干净，清洗前请阅读《工艺前处理说明书》。
2．将工件仔细装卡在工件架上，调节转架按钮，检查工件在转动过程中是否有相互碰撞，遮挡或装卡不牢等现象。
3． 确认正常无误后关好门，按抽空操作程序进行真空操作，将镀膜室真空 抽至7*10-3Pa。
注意：开始操作前必须检查各部分冷却水是否畅通
4． 接通加热电源，也可根据不同的工艺要求提前加热。
5．排气及加热完毕后，按下V4按钮，关闭节流阀，打开质量流量计电源开关，接通Ar气路，调节旋钮加大Ar流量直至真空度为2-2.6Pa左右。
6．氩离子轰击清洗：按下轰偏及加热控制板上电源开关，接通轰偏电源，此时轰偏电源电压处于零位。旋转轰偏电压电位器旋钮，逐渐提高输出电压，其数值由轰偏电压表读出。随着电压的提高，透过观察窗可以看到镀膜室有辉光放电现象。轰偏电压表指针摆动（说明工件表面有毛刺或脏物存在），此时应暂停增加电压，直到表针稳定时，再继续提高电压，轰击电压一般为800V左右，若无打火现象，则在该电压下保持2-3min后，将电压降回零。
7．关断Ar气，旋转质量流量计控制板上的电位器旋钮至零位。置选择开关CLOSE关闭位置，关闭电源开关。
8．恢复高真空。开节流阀抽至（1-2）*10-2Pa-7*10-3Pa时再关节流阀。
9．接通高纯N2。按下质量流量计控制板上N2的电源开关，接通电源，将流量计选择开关置VALVE状态，旋转电位器旋钮，增大N2的流量，这时数字表显示为N2流量值。Ar的流量由工艺规程决定。同时观察真空计控制板上的真空达到工艺要求（4-8）*10-2Pa值为止。
10．接通轰偏电压调至工艺要求值。按下轰偏及加热源控制板上电源开关，旋转电位器旋钮，此时轰偏电压逐步提高至工艺要求值。
1) Workpieces must be cleaned. Prior to cleaning, please read the instruction of preprocessing carefully.
2) Mount the workpieces on the turntable, rotate the turntable button, and check whether there is blocking, crash or loose during the rotation.
3) Close the door aftyer making sure that it is normal, and conduct vacuum operation according to the exhaust procedure until the vacuum degree is 7*10-3Pa.
Notes: It is necessary to check whether the cooling water route of all parts is smoothing prior to the operation.
4) Connect to heating power supply or preheat according to the different processes.
5) After exhausting and heating, press the button V4 to close throttle valve, turn on power supply of mass flow meter to connect to Ar passage, and adjust the knob to increase the Ar flow rate until the vacuum degree reaches 2-2.6Pa.
6) Argon ion bombardment cleaning：Press the switch of power supply on bias bombardment and heating control panel to connect to bias & bombardment power supply just when the voltage of bias & bombardment power supply is at zero. Turn the knob of voltage potentiometer of bias bombardment power supply to increase output voltage, whose value could be read through volt gauge. With the growth of voltage, the cold-cathode discharge could be observed in the plating chamber through the observing view port, indicating there are some burrs or dirties on the surface of work piece. Therefore, it should stop increasing voltage. After the needle of voltage reaches stability, it could continue to increase voltage. Generally, the bombardment voltage is around 800V. If there is no fire fighting, the voltage should be reduced to zero after the voltage is no changed for 2-3 min.
7) Cut the Ar gas, turn the knob of potentiometer on the mass flow meter to the zero. Put the selector button to close position and close the power supply.
8) Recover the high-vacuum. Open flow regulating valve before the vacuum degree reaches （1-2）*10-2Pa-7*10-3Pa.
9) Connect the high and pure N2. Connect the power supply of N2 on the control panel of mass flow meter. Put the switch at the position of VALVE, turn the knob of potentiometer to increase the flow of N2. At this time, the flow value of N2 will be showed in the numeral indicator. The flow rate of Ar is depend on the process specification. Meantime, observe the vacuum value in the vacuum meter before it reaches （4-8）*10-2Pa.
10) Connect the bombardment grid bias voltage, and adjust it to the requirement of process. Connect the power supply of bombardment grid bias and heating, turn the knob of potentiometer. At this time, the bombardment grid bias voltage should be gradually increased to the requirement of process.
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